Linear Motor Stages Enable High-Accuracy Processing

Aerotech’s Planar DL-series XY linear motor stages are designed to provide improved planar geometry performance in applications requiring straightness and flatness of motion. The stages feature high-precision, anti-creep crossed-roller bearings, precision-machined surfaces and the company’s linear motors driving through the axes’ center of stiffness for improved geometric tolerances.

Capable of achieving 1-m/sec. velocities and 1.5-g accelerations, the stages enable high-accuracy processing. Their structural elements are said to be optimized for high stiffness, and the noncontact direct-drive technology is said to offer high-speed, accurate positioning, along with maintenance-free operation and long service life. The Planar DL 200XY and 300XY stages are available with one or two motors per axis, enabling optimization of each access for the application and process parameters. Extra servo axes, air/vacuum lines or vacuum chucks, or other process pneumatics are available as options.